Thermal control systems for process tools requiring...

Details Thermal control systems for process tools requiring... Thermal control systems for process tools requiring...

2006-02-07

2006-02-07

Tapolcai, William E. (Department: 3744)

Refrigeration

Processes

Exchanging heat between plural systems, e.g., disparate

C062S335000

Reexamination Certificate

active

06993918

ABSTRACT:
A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at least two cascaded stages, each operating with a different fluid in a separate refrigeration cycle. By interrelating energy transfers between parts of upper and lower stages, thermal efficiency is maximized and a smooth continuum of temperature levels can be provided. The refrigerants advantageously have vaporization points below and above ambient, for upper and lower stages respectively, and employs the upper stage for a constant refrigeration capacity, controlling the final temperature with the lower stage. The system allows for a further extension of range because the thermal transfer fluid can be heated for some process tool modes as the refrigeration cycles are run at low loads.

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