Thermal control system for a semi-conductor burn-in

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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219450, 219516, G01R 3102, H05B 102

Patent

active

053152409

ABSTRACT:
A temperature controller to accurately control the temperature of a device under test (DUT) a heat exchanger in heat exchange relationship with the DUT. A temperature sensor is received within the heat exchange device and thermally isolated therefrom. This temperature sensor measures the temperature of the DUT. A second temperature sensor is received within the heat exchange device and measures the temperature of the heat exchange device. The temperature of the DUT is based on temperature readings from both the sensors.

REFERENCES:
patent: 2806122 (1957-09-01), Thunander
patent: 3153139 (1964-10-01), Sivacek
patent: 4241289 (1980-12-01), Bowling
patent: 4493981 (1985-01-01), Payne
patent: 4968931 (1990-11-01), Littlebury et al.

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