Thermal control of a DUT using a thermal control substrate

Details Thermal control of a DUT using a thermal control substrate Thermal control of a DUT using a thermal control substrate

2006-01-10

2006-01-10

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C062S003100, C062S003200

Reexamination Certificate

active

06985000

ABSTRACT:
A solid state thermal control device contains a substrate and a plurality of solid state thermal elements on the substrate. The thermal elements are adapted to provide thermal control to a device under test (DUT). Each solid state thermal element contains at least one solid state heater and an active control circuit adapted to control a thermal output of the heater. Optionally, the each thermal element may also include a solid state temperature sensor.

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