Thermal control line for delivering liquid to a point of use in

Details Thermal control line for delivering liquid to a point of use in Thermal control line for delivering liquid to a point of use in

1993-07-16

1995-06-27

Bell, Janyce

Coating processes

Centrifugal force utilized

118 52, 118320, 2221466, 4273981, 4273983, 427421, B05B 312, B67D 562, B05C 1302

Patent

active

054278201

ABSTRACT:
An apparatus and method for dispensing liquid at a controlled temperature in a spin coating or developer machine are disclosed. The apparatus is a thermal control line that has an inner core wall that encloses at least one conduit for a liquid dispense line and an outer annular wall that encloses at least one chamber for circulation of coolant. The inner core wall and the outer annular wall are formed of such materials as to permit efficient heat exchange between the coolant and the liquid. The coolant is circulated in the annular chamber at a rate sufficient to maintain the dispensed liquid at a desired temperature.

REFERENCES:
patent: 4171064 (1979-10-01), Cornelius et al.
patent: 4190015 (1980-02-01), Hillman
patent: 4561486 (1985-12-01), Maedy et al.
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 5121612 (1992-06-01), Guay et al.
patent: 5279446 (1994-01-01), Cook et al.
patent: 5297700 (1994-03-01), Burrows et al.

Affiliated with

Also associated with

Rating

Thermal control line for delivering liquid to a point of use in does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal control line for delivering liquid to a point of use in , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal control line for delivering liquid to a point of use in will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-285788