Optical: systems and elements – Mirror – With support
Reexamination Certificate
2007-08-28
2007-08-28
Spector, David N. (Department: 2873)
Optical: systems and elements
Mirror
With support
C359S872000, C359S584000, C359S290000
Reexamination Certificate
active
11360165
ABSTRACT:
A micromirror apparatus includes a device layer having a recess, a multilayer thin-film dielectric reflector coupled to and structurally supported by the device layer on the opposite side of the device layer from said recess, and a stress compensator seated in the recess, with the stress compensator operable to resist device layer bending moments resulting from intrinsic and thermal mismatch stresses between the multilayer thin-film dielectric reflector and the device layer.
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Borwick, III Robert L.
DeNatale Jeffrey F.
Stupar Philip A.
Tsai Chialun
Koppel, Patrick, Heybl & Dawson
Spector David N.
Teledyne Licensing LLC
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