Thermal actuator for an infrared sensor

Details Thermal actuator for an infrared sensor Thermal actuator for an infrared sensor

2008-07-28

2010-11-30

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07842923

ABSTRACT:
In one embodiment, an infrared (IR) sensor has a flexible beam connected between two anchors supported on a substrate. The beam is mechanically coupled to a plate that has an IR-absorbing layer and is adapted to transfer the IR-induced heat to the beam. The heat transfer causes the beam to deform and move the plate with respect to the substrate. The motion of the plate is detected electrically or optically to quantify the amount of IR radiation received by the plate. The beam, anchors, and plate are formed from a planar layer of material that is supported at a specified offset distance from the substrate. During fabrication, certain portions of the planar layer are removed to define the beam, anchors, and plate.

REFERENCES:
patent: 3384749 (1968-05-01), Golay
patent: 4306150 (1981-12-01), Dietz
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5739538 (1998-04-01), Sakaue et al.
patent: 6080988 (2000-06-01), Ishizuya et al.
patent: 6201631 (2001-03-01), Greywall
patent: 6367252 (2002-04-01), Hill et al.
patent: 6667823 (2003-12-01), Greywall
patent: 6734597 (2004-05-01), Howell et al.
patent: 6806991 (2004-10-01), Sarkar et al.
patent: 6850354 (2005-02-01), Greywall
patent: 6869169 (2005-03-01), Cabal et al.
patent: 6876484 (2005-04-01), Greywall
patent: 6900440 (2005-05-01), Reed et al.
patent: 6924581 (2005-08-01), Greywall
patent: 6980339 (2005-12-01), Greywall et al.
patent: 6995895 (2006-02-01), Greywall
patent: 7011288 (2006-03-01), Slicker et al.
patent: 7099063 (2006-08-01), Greywall
patent: 7541585 (2009-06-01), Massoni et al.
patent: 2002/0153486 (2002-10-01), Ishizuya et al.
patent: 2003/0089865 (2003-05-01), Eldridge
patent: 2003/0099082 (2003-05-01), Tuo et al.
patent: 2003/0111603 (2003-06-01), Sone et al.
patent: 2005/0229710 (2005-10-01), O'Dowd et al.
patent: 2006/0152105 (2006-07-01), Aksyuk et al.
patent: 2006/0158484 (2006-07-01), Greywall
patent: 2006/0228896 (2006-10-01), Greywall
Dennis Greywall, U.S. Appl. No. 11/531,011, filed Sep. 12, 2006.
Vladimir Anatolyevich Aksyuk, U.S. Appl. No. 11/766,430, filed Jun. 21, 2007.
Vladimir Anatolyevich Aksyuk, U.S. Appl. No. 11/766,414, filed Jun. 21, 2007.
U.S. Appl. No. 11/713,207, filed Mar. 2, 2007.
“High Sensitivity Uncooled Microcantilever Infrared Imaging Arrays,” by Scott R. Hunter et al., Infrared Technology and Applications XXIX, Bjørn F. Andresen, Gabor F. Fulop, Editors, Proceedings of SPIE vol. 5074, 2003, pp. 469-480.
“Optomechanical Uncooled Infrared Imaging System,” by Yang Zhao, Dissertation, University of California, Berkeley, Fall 2002, pp. 1-155.
“Design and Fabrication of a Novel Bimorph Microoptomechanical Sensor,” by Si-Hyung Lim et al., Journal of Microelectromechanical Systems, vol. 14, No. 4, Aug. 2005, pp. 683-690.
“Infrared Vision Using Uncooled Optomechanical Camera” by A. Majumdar et al., Proceedings of SPIE, vol. 3948, (2000), 0277-786X/00, pp. 74-79.
“‘Self-Leveling’ Uncooled Microcantilever Thermal Detector,” by J.L. Corbeil et al., Applied Physics Letters, vol. 81, No. 7, Aug. 12, 2002, American Institute of Physics, pp. 1306-1308.
“Solid State Optical Thermal Imagers,” Matthias Wagner et al., Infrared Technologies and Applications XXXIII, Proc. of SPIE, vol. 6542, 65421P, (2007) 0277-786X/07, 10 pages.
“Uncooled Infrared Imaging Using Bitmaterial Microcantilever Arrays,” N.V. Lavrik et al., Infrared Technology and Applications XXXII, Proc. of SPIE vol. 6206, 62061K, (2006) 0277-786X/06, 8 pages.
“Optically Readable Bi-Material Infrared Detector,” by Tohru Ishizuya et al., Infrared Technology and Applications XXVII, Proceedings of SPIE vol. 4369 (2001), pp. 342-349.
“Uncooled MEMS IR Imagers with Optical Readout and Image Processing,” by Nickolay Lavrik et al., Infrared Technology and Applications XXXIII, Proc. of SPIE vol. 6542, 65421E, (2007), 8 pages.
“High Sensitivity Photomechanical MW-LWIR Imaging Using an Uncooled MEMS Microcantilever Array and Optical Readout,” by J. Zhao, Infrared Technology and Applications XXXI, Proc. of SPIE vol. 5783, 2005, pp. 506-513.
“High Frame Rate Imaging Using Uncooled Optical Readout Photochemical IR Sensor,” by Jack P. Salerno, Infrared Technology and Applications XXXIII, Proc. of SPIE vol. 6542, 65421D, (2007), (9 pages).
“160×120 Pixels Optically Readable Bimaterial Infrared Detector,” by Tohru Ishizuya et al., Nikon Corporation, Photonics Technology Department, Core Technology Center, IEEE 0-7803-71/85-2/02, 2002, pp. 578-581.

Affiliated with

Also associated with

Rating

Thermal actuator for an infrared sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal actuator for an infrared sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal actuator for an infrared sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4247229