Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate
2006-05-16
2006-05-16
Nguyen, Hoang (Department: 3748)
Power plants
Motor operated by expansion and/or contraction of a unit of...
Mass is a solid
C060S528000
Reexamination Certificate
active
07043910
ABSTRACT:
An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
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Bookham Technology PLC
Laubscher, Jr. Lawrence E.
Nguyen Hoang
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