Thermal actuator

Details Thermal actuator Thermal actuator

1998-07-10

2000-05-30

Nguyen, Hoang

Power plants

Motor operated by expansion and/or contraction of a unit of...

Mass is a solid

60529, F01B 2910

Patent

active

06067797&

ABSTRACT:
An improved form of thermal actuator suitable for use in a MEMS device. The actuator includes a first material such as polytetrafluoroethylene having a high coefficient of thermal expansion and a serpentine heater material having a lower coefficient of thermal expansion in thermal contact with the first material and heating the first material on demand. The serpentine heater material is elongated upon heating so as to accommodate the expansion of the first material.

REFERENCES:
patent: 4300350 (1981-11-01), Becker
patent: 4844117 (1989-07-01), Sung
patent: 5271597 (1993-12-01), Jerman
patent: 5318268 (1994-06-01), Cox et al.
patent: 5619177 (1997-04-01), Johnson et al.

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