TFT substrate having scanning lines of metal films of columnar c

Details TFT substrate having scanning lines of metal films of columnar c TFT substrate having scanning lines of metal films of columnar c

1995-05-25

1997-05-27

Gross, Anita Pellman

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

G02F 1136, H01L 2904

Patent

active

056337388

ABSTRACT:
A liquid crystal display comprises a lower substrate provided with a plurality of scanning signal lines, a plurality of image signal lines perpendicularly intersecting the scanning signal lines, a plurality of thin-film transistors formed at the intersection points of the scanning signal lines and the image signal lines, and a plurality of pixel electrodes connected respectively to the thin-film transistors; an upper substrate disposed opposite to the lower substrate and provided with a common electrode opposite to the pixel electrodes; and liquid crystal layer sealed in a space formed between the lower and the upper substrate. Each of the scanning signal lines is formed so as to form the gate electrode of a corresponding thin-film transistor, the scanning signal lines are formed by processing a metal film of columnar crystal grains, and the surface of the metal film is coated with a self-aligned oxide film.

REFERENCES:
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patent: 5181132 (1993-01-01), Shindo et al.
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patent: 5285301 (1994-02-01), Shirahashi et al.
patent: 5327268 (1994-07-01), Takabatake et al.
patent: 5464500 (1995-11-01), Tsujimura et al.
patent: 5495353 (1996-02-01), Yamazaki et al.

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