TFT, method of manufacturing the TFT, flat panel display...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

Reexamination Certificate

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C257S072000, C257S059000, C257S347000, C257SE27062, C257SE27111, C438S149000

Reexamination Certificate

active

07442960

ABSTRACT:
A thin film transistor (TFT) including a semiconductor film that may be simply patterned, a method of manufacturing the TFT, a flat panel display (FPD) including the TFT, and a method of manufacturing the FPD. The TFT includes a gate electrode, source and drain electrodes electrically insulated from the gate electrode, and a semiconductor film electrically insulated from the gate electrode and including source and drain regions coupled to the source and drain electrodes, respectively, and a channel region coupling the source and drain regions. The semiconductor film has a groove that isolates the channel region from an adjacent TFT.

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Ioannis Kymissis, et al., Patterning Pentacene Organic Thin Film Transistors, 2002 American Vacuum Society, J. Vac. Sci. Technol. B 20(3), May/Jun. 2002, pp. 956-959.
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Yoichiroh Hosokawa, et al., Femtosecond Multistep Laser Etching of Transparent Amorphous Organic Film, Japanese Journal of Applied Physics, Publication Office Japanese Journal of Applied Physics, Tokyo, Japan, vol. 40, No. 10B, part 2, Oct. 15, 2001, pp. L1116-L1118.
International Search Report, Sep. 26, 2005.

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