TFT device

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

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257291, 257436, 257439, 257463, 257464, 25037014, H01L 3110, H01L 2714

Patent

active

053089960

ABSTRACT:
A TFT device has an insulation substrate, a semiconductor layer formed on the insulation substrate, a pair of opposed electrodes formed on the semiconductor layer, and a gate electrode formed on the semiconductor layer with an insulation film interposed therebetween, wherein a region doped with at least one type of impurity selected from atoms belonging to the V group of the periodic table is formed in the semiconductor layer at the vicinity of the interface between the semiconductor layer and the insulation layer.

REFERENCES:
patent: 3289054 (1966-11-01), Haering
patent: 4143266 (1979-03-01), Borel et al.
patent: 4461956 (1984-07-01), Hatanaka
patent: 4886962 (1989-12-01), Gofuku et al.
patent: 4931661 (1990-06-01), Fukaya et al.
English translation of the pertinent part of the Japanese Laid-Open Gazette No. 60-239072.

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