TFT array inspection apparatus

Details TFT array inspection apparatus TFT array inspection apparatus

2007-01-02

2007-01-02

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S701000

Reexamination Certificate

active

10825334

ABSTRACT:
A TFT array inspection apparatus inspects a TFT array by irradiating an electron beam on a TFT substrate to obtain potential information. The TFT array inspection apparatus includes a scanning device for scanning the TFT substrate with an electron beam; a defect detecting device for detecting a defective site on the TFT substrate from a scanning signal of the TFT substrate; an irradiating device for irradiating the electron beam on the detected defective site; and a defect analyzing device. The defect analyzing device analyzes at least a type and/or an extent of the defect of the defective site based on a waveform change of a secondary electron signal detected through the electron beam irradiation and a driving state of the TFT.

REFERENCES:
patent: 4906922 (1990-03-01), Takahashi et al.
patent: 5432461 (1995-07-01), Henley
patent: 5982190 (1999-11-01), Toro-Lira
patent: 6765203 (2004-07-01), Abel
patent: 6873175 (2005-03-01), Toro-Lira et al.

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