Stock material or miscellaneous articles – All metal or with adjacent metals – Surface feature
Reexamination Certificate
2008-07-18
2011-10-18
Lavilla, Michael (Department: 1784)
Stock material or miscellaneous articles
All metal or with adjacent metals
Surface feature
C428S612000, C428S670000, C428S671000, C428S672000, C428S673000, C428S674000, C428S650000, C428S680000, C428S681000, C428S682000, C428S686000, C428S332000, C428S336000, C427S383700, C427S436000, C977S810000, C977S832000
Reexamination Certificate
active
08039119
ABSTRACT:
Orientation degree and smoothness of a substrate surface better than those of conventional ones are provided in a textured substrate for epitaxial thin film growth. The present invention is a textured substrate for epitaxial film formation, including a crystal orientation improving layer made of a metal thin film of 1 to 5000 nm in thickness on the surface of the textured substrate for epitaxial film formation having a textured metal layer at least on one surface, wherein differences between orientation degrees (Δφ and Δω) in the textured metal layer surface and orientation degrees (Δφ and Δω) in the crystal orientation improving layer surface are both 0.1 to 3.0°. Further, when another metal different from the metal constituting this textured substrate crystal orientation improving layer is added equivalent to a thin film which is 30 nm or less, and subsequently is subjected to heat treatment, the smoothness of that surface can be improved. At this time, the surface roughness of the substrate surface becomes 20 nm or less.
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Kashima Naoji
Kubota Shuichi
Nagaya Shigeo
Shima Kunihiro
Chubu Electric Power Co., Inc.
Lavilla Michael
Roberts & Roberts, LLP
Tanaka Kikinzoku Kogyo K.K.
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