Organic compounds -- part of the class 532-570 series – Organic compounds – Oxygen containing
Patent
1995-03-07
1996-09-10
Baxter, Janet C.
Organic compounds -- part of the class 532-570 series
Organic compounds
Oxygen containing
568644, 568660, 568720, C07C 4330, C07C 4332
Patent
active
055547974
ABSTRACT:
Positive photoresist compositions comprising, in an organic solvent, at least
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Knobloch Wilhelm
M unzel Norbert
Roth Martin
Schulz Reinhard
Baxter Janet C.
OCG Microelectronic Materials Inc.
Simons William A.
Young Christopher G.
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