Testing of recessed surfaces at grazing incidence

Details Testing of recessed surfaces at grazing incidence Testing of recessed surfaces at grazing incidence

1995-03-16

1996-07-02

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356355, G01B 902

Patent

active

055328210

ABSTRACT:
An interferometer (10) includes a prism extender (50) appended to a prism (32) for directing a beam of light (42) into a recess (44) of a test piece (34). A first portion (42a) of the beam (42) refracts from a reference surface (54) of the prism extender (50) to an angle (.alpha.) of grazing incidence on a bottom surface (46) of the recess (44), and a second portion (42b) of the beam (42) reflects from the reference surface (54). The two portions (42 aand 42b) of the beam (42) recombine at the reference surface (54) forming an interference pattern indicative of differences between the reference surface (54) and the bottom surface (46) of the recess (44).

REFERENCES:
patent: 2601175 (1952-06-01), Smith
patent: 2693735 (1954-11-01), Zehender
patent: 3514182 (1970-05-01), Banks
patent: 3514183 (1970-05-01), Rabedeau
patent: 3520595 (1970-07-01), Treuthart
patent: 3891320 (1975-06-01), Kimura et al.
patent: 4325637 (1982-04-01), Moore
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patent: 5095389 (1992-03-01), Yokomori
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5305089 (1994-04-01), Hosoe
"Interference Flatness Testing of Nonoptical Surfaces", Briers, Applied Optics, Mar. 1971, 519-524.

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