Testing of a micro-electromechanical device for under actuation

Details Testing of a micro-electromechanical device for under actuation Testing of a micro-electromechanical device for under actuation

2007-01-16

2007-01-16

Nguyen, Thinh (Department: 2861)

Incremental printing of symbolic information

Ink jet

Controller

C347S048000

Reexamination Certificate

active

11030875

ABSTRACT:
A method of determining under actuation of a micro electromechanical device of a type having a support structure, an actuating arm that is movable relative to the support structure between a rest position and an operating position under the influence of heat inducing current flow through the actuating arm. A movement sensor is associated with the actuating arm that is activated by movement of the actuating arm to a predetermined position beyond the operating position. The method comprises the steps of: passing a series of current pulses of varying magnitude and/or duration through the actuating arm; determining the minimum magnitude and/or duration of the current pulse required to move the actuating arm to the predetermined position, and comparing the determined magnitude and/or duration with a desired magnitude and/or duration characteristic. Under actuation is determined when the detected movement is less than the desired magnitude and/or duration characteristic.

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Design, Fabrication, and Teting of a C-Shape Actuator; G Lin, CJ Kim, S Konishi, H Fujita; IfM, Louisiana Tech Univ., PO Box 10348, Rustom, LA 71272, USA; Mane Dept, UCLA, Los Angeles, CA 90095, USA; IIS, Univ of Tokyo, Roppongi, Minato-ku, Tokyo 106 Japan.

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