Testing method including the removal of insulative films for ele

Details Testing method including the removal of insulative films for ele Testing method including the removal of insulative films for ele

1997-11-25

2000-05-02

Brown, Glenn W.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, 324609, G01R 3126, H01L 2166

Patent

active

060576944

ABSTRACT:
This invention provides a method and apparatus for vapor-phase processing (e.g., plasma-processing) the object to be tested, thereby removing the insulating oxide films at least at portions on the electrodes with which measurement contactors come into contact, bringing the measurement contactors into contact with the portions on the electrodes from which the films have been removed, and testing the electrical characteristics of the object to be tested.

REFERENCES:
patent: 5739052 (1998-04-01), Krishnan et al.
patent: 5861634 (1999-01-01), Hsu et al.

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