Testing MEM device array

Details Testing MEM device array Testing MEM device array

2006-04-11

2006-04-11

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Electromechanical switching device

C324S418000

Reexamination Certificate

active

07026821

ABSTRACT:
A system of an embodiment of the invention includes an array of micro-electromechanical (MEM) device assemblies and a testing mechanism situated outside of the array of the MEM device assemblies. Each MEM device assembly includes a MEM device capable of being individually written to, but incapable of being electrically read. The testing mechanism tests each MEM device assembly for proper operation without directly reading the MEM device of the MEM device assembly.

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Computer Desktop Encyclopedia entry for “MEMS,” copyright 1981-2004, version 17.4, 4th Quarter 2004.

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