Testing apparatus of semiconductor wafers

Details Testing apparatus of semiconductor wafers Testing apparatus of semiconductor wafers

1982-08-02

1985-05-21

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158P, G01R 106, G01R 3102

Patent

active

045189145

ABSTRACT:
A testing apparatus of semiconductor wafers includes a base plate and a probe card including probe needles, wherein the probe card is detachably affixed to the base plate under air suction, which is derived from a vacuum produced in an airtightly sealed space provided between the base plate and the probe card.

REFERENCES:
patent: 3866119 (1975-02-01), Ardezzone et al.
patent: 3996517 (1976-12-01), Ferguson et al.
patent: 4101830 (1978-07-01), Greig
patent: 4164704 (1979-08-01), Kato et al.
patent: 4321533 (1982-03-01), Matrone
patent: 4322682 (1982-03-01), Schadwill
patent: 4423376 (1983-12-01), Byrnes et al.

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