Testing apparatus and connection method for the testing apparatu

Details Testing apparatus and connection method for the testing apparatu Testing apparatus and connection method for the testing apparatu

1994-05-19

1996-02-06

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 725, 324 731, G01R 3102

Patent

active

054898536

ABSTRACT:
A testing apparatus has a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements, a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position, a cylindrical connection unit, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being movably supported by the test head, a head plate for supporting the probe card, a driving mechanism for moving the probe card between a test position near the head plate and a wait position away from the head plate, and a movement limiting member for limiting movement of the connection member towards the test head and applying a pressing force to the connection member and the probe card via the second contact portions in cooperation with the driving mechanism, when the probe card is shifted from the wait position to the test position by the driving mechanism.

REFERENCES:
patent: 5254939 (1993-10-01), Anderson et al.
patent: 5321454 (1994-06-01), Mori

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