Tester for testing semiconductor device

Details Tester for testing semiconductor device Tester for testing semiconductor device

2011-01-18

2011-01-18

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07872488

ABSTRACT:
A tester for testing a semiconductor device is disclosed. In accordance with the tester of the present invention, the tester is configured to have different drive signal path and input/output signal path wherein the drive signal path has a fly-by structure, i.e. a daisy chain structure and the input/output signal path has a star-stub structure such that more DUTs may be tested simultaneously and an integrity of the signals is secured.

REFERENCES:
patent: 5416409 (1995-05-01), Hunter
patent: 6327678 (2001-12-01), Nagai
patent: 6779140 (2004-08-01), Krech et al.
patent: 6831473 (2004-12-01), Iorga
patent: 7372287 (2008-05-01), Ezoe
patent: 7595629 (2009-09-01), Miller

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