Test wafer for an optical scanner

Details Test wafer for an optical scanner Test wafer for an optical scanner

1991-06-17

1992-01-07

McGraw, Vincent P.

Optics: measuring and testing

Standard

G01N 2188

Patent

active

050784927

ABSTRACT:
A patterned wafer for testing an optical scanner. The wafer has standard size light scattering features, such as pits, distributed in aligned groups arranged in annular bands about a concentric center. Empty annular bands separate the feature containing annular bands. The empty bands simulate wafer edges for various size wafers. In this manner, wafer edges may be excluded in a particle count for a predetermined size wafer. Apparent size variations in multiple scans indicate misalignments relative to the scan center.

REFERENCES:
patent: 4512659 (1985-04-01), Galbraith et al.
patent: 4636073 (1987-01-01), Williams
patent: 5004340 (1991-04-01), Tullis et al.

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