Test system for VLSI digital circuit and method of testing

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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307350, 324158T, G01R 3128

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active

045889503

ABSTRACT:
The conductive state of a transistor in a semiconductor integrated circuit is determined by irradiating the transistor with a radiation beam and measuring changes in load current, thereby indicating whether the transistor was conducting or non-conducting prior to irradiation. A correlated double sampling method is employed in measuring changes in load current. A load resistor in series with the device under test is capacitively coupled to a differential amplification means including a plurality of differential amplifiers with buffers connected between successive amplifiers. A system clock is stopped at a predetermined time period prior to irradiating the transistor. A bypass switch shunts the load resistor until the clock is stopped.

REFERENCES:
patent: 4242635 (1980-12-01), Burns
patent: 4287441 (1981-09-01), Smith
Peterson, R., "High Performance Integrated Circuits for High-Gain FM-IF Systems", IEEE Trans. Broadcast & Tele. Rcvrs., vol. 16, No. 4, Nov. 1970, pp. 257-263.
McMahon, R., "A Laser Scanner for Integrated Circuit Testing", Proc. 1972 Int'l. Reliability Physics Symp., pp. 23-25.

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