Test structure to monitor the release step in a...

Details Test structure to monitor the release step in a... Test structure to monitor the release step in a...

2011-04-26

2011-04-26

Nguyen, Hoai-An D (Department: 2831)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C438S017000, C702S065000

Reexamination Certificate

active

07932727

ABSTRACT:
Electrical and visual test structures monitor the degree of removal of conductive sacrificial layers used in micromachining processes that fabricate micro-electromechanical systems (MEMS).

REFERENCES:
patent: 3763430 (1973-10-01), Terrey
patent: 6403979 (2002-06-01), Kadosh et al.
patent: 7045371 (2006-05-01), Goto
patent: 2007/0143048 (2007-06-01), Yamaguchi et al.
patent: 2010/0065847 (2010-03-01), Gotou et al.

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