Test structure for the measurement of contact to gate...

Details Test structure for the measurement of contact to gate... Test structure for the measurement of contact to gate...

2005-06-07

2005-06-07

Lebentritt, Michael S. (Department: 2824)

Static information storage and retrieval

Addressing

Plural blocks or banks

C365S063000

Reexamination Certificate

active

06903995

ABSTRACT:
An integrated non-volatile memory device may include a first matrix of memory cells organized into rows (or word lines) and columns (or bit lines), corresponding row and column decoding circuits, and read, modify and erase circuits for reading and modifying data stored in the memory cells. Furthermore, the memory device may also include a test structure including a second matrix of memory cells smaller than the first. The second memory matrix may include word line couplings each having a different contact to gate distance. That is, each coupling is aligned a different distance from its respective gate than adjacent couplings.

REFERENCES:
patent: 5712816 (1998-01-01), Cappelletti et al.
patent: 5745417 (1998-04-01), Kobayashi et al.
patent: 6331954 (2001-12-01), Wang et al.
patent: 6381167 (2002-04-01), Ooishi et al.
patent: 6549445 (2003-04-01), Ooishi et al.
patent: 6754099 (2004-06-01), Hidaka

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