Test structure for speeding a stress-induced voiding test...

Details Test structure for speeding a stress-induced voiding test... Test structure for speeding a stress-induced voiding test...

2007-01-02

2007-01-02

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C257S048000

Reexamination Certificate

active

10822193

ABSTRACT:
A test structure, having: a first member having: a roughly a rectangular shape; a first width dimension; and a first length dimension that is greater than the first width dimension; and a second member having: a roughly a rectangular shape; a second width dimension; and a second length dimension that is greater than the second width dimension combined with the first member to form a roughly symmetrical cross-shaped test structure. Also a method of using the test structure to test for voids.

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