Test structure for resistive open detection using voltage...

Details Test structure for resistive open detection using voltage... Test structure for resistive open detection using voltage...

2007-10-15

2010-06-08

Nguyen, Vinh P (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S501000, C324S754120

Reexamination Certificate

active

07733109

ABSTRACT:
A test structure for resistive open detection using voltage contrast (VC) inspection and method for using such structure are disclosed. The test structure may include a comparator within the IC chip for comparing a resistance value of a resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test, wherein the result is detectable by the voltage contrast inspection.

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Babazadeh et al., “First Look at Across-chip Performance Variation Using Non-Contact, Performance-Based Metrology,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 2006, pp. 278-283.
Patterson et al., “Detection of Resistive Shorts and Opens using Voltage Contrast Inspection,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 2006, pp. 327-333.
Patterson et al., “Detecting resistive shorts and opens using voltage contrast inspection,” micromagazine.com, MICRO, Jun. 2006, pp. 67-79.

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