Test structure and method for failure analysis of small...

Details Test structure and method for failure analysis of small... Test structure and method for failure analysis of small...

2006-11-14

2006-11-14

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S763010

Reexamination Certificate

active

07135879

ABSTRACT:
A method for failure analysis of small contacts in integrated circuits is provided. A number of opposing electrical contacts is configured to contact a sample in an offset pattern such that any one electrical contact may contact more than one conductor in the sample and any opposing electrical contact is offset-positioned to contact no more than one of the conductors contacted by the one electrical contact.

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