Test station

Details Test station Test station

1988-10-12

1990-01-16

Arnold, Bruce Y.

350529, 350531, G02B 2126, G02B 2132

Patent

active

048939145

ABSTRACT:
A test station for use in evaluating semiconductor chips and the like. The test station has improved components for supporting and adjusting the positions of a microscope and stage relative to a base surface which supports a plurality of probes.

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