Test semiconductor device and method for determining Joule...

Details Test semiconductor device and method for determining Joule... Test semiconductor device and method for determining Joule...

2008-06-17

2008-06-17

Nguyen, Ha (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07388395

ABSTRACT:
Method and test structures for determining heating effects in a test semiconductor device (10) are provided. The test device may include a first conductive metal structure (151-156) for accepting a flow of electric current that causes a heating effect. The test device may further include a second conductive metal structure proximate (121-126) the first conductive structure for obtaining resistivity changes in response to the heating effect. The resistivity changes are indicative of temperature changes due to the heating effect.

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