Test probe manipulator for wafer-probing apparatus

Details Test probe manipulator for wafer-probing apparatus Test probe manipulator for wafer-probing apparatus

1990-05-14

1991-05-07

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 33543, G01R 3102, G01R 728

Patent

active

050140019

ABSTRACT:
The test-probe manipulator for a test probe for use with semiconductor wafers utilizes three adjusting spindles (50,51,52) arranged on the same side of the manipulator. The test-probe manipulator occupies little space and is easy to operate. All three axes of translational freedom perform linear motions independent of each other. Accuracy of adjustment is improved as compared to conventional devices. Easy placement on and removal from a test platform are ensured.

REFERENCES:
patent: 3333274 (1967-07-01), Forcier
patent: 3648169 (1972-03-01), Wiesler
patent: 4056777 (1977-11-01), Roch
patent: 4063172 (1977-12-01), Faure et al.
patent: 4167066 (1979-09-01), Cooper et al.
patent: 4565966 (1986-01-01), Burr et al.
patent: 4746857 (1988-05-01), Sakai
patent: 4751457 (1988-06-01), Veenendaal
patent: 4901446 (1990-02-01), Narishige
IBM Technical Disclosure Bulletin, vol. 20, No. 9, Feb. 1978, pp. 3461-3462; L. H. Faure, et al.: "Testing Apparatus with Selectable Probes and Contractors for Use with Changable Patterns".
IBM Technical Disclosure Bulletin, vol. 13, No. 7, Dec. 1970, pp. 2113-2114; J. W. Wagner, et al.: "Orbiting Probe".

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