Test method of microstructure body and micromachine

Details Test method of microstructure body and micromachine Test method of microstructure body and micromachine

2006-11-30

2010-10-05

Dole, Timothy J (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Distributive type parameters

C324S633000, C216S061000, C216S086000, C438S017000

Reexamination Certificate

active

07808253

ABSTRACT:
It is an object to provide a test method of a process, an electric characteristic, and a mechanical characteristic of a structure body in a micromachine without contact. A structure body including a first conductive layer, a second conductive layer provided in parallel to the first conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer is provided; an antenna connected to the structure body is provided; electric power is supplied to the structure body wirelessly through the antenna; and an electromagnetic wave generated from the antenna is detected as a characteristic of the structure body.

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