Test method and device for semiconductor circuit

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324763, G01R 3128

Patent

active

061508314

ABSTRACT:
A semiconductor test device capable of solving a problem of a conventional one in that in the resistance measurement of a semiconductor integrated circuit it was difficult for the measurement error due to contact resistance or wiring resistance to be limited within a desired amount. The present semiconductor test device includes, in a semiconductor integrated circuit having a first semiconductor switch functioning as a pullup resistor and a second semiconductor switch functioning as a pulldown resistor, a measuring circuit for bringing the first and second semiconductor switches into conduction at the same time in response to a signal fed from a control circuit, a voltage measuring circuit for measuring the voltage at a connecting point between the two semiconductor switches, and a current measuring circuit for measuring a through current flowing through the two semiconductor switches.

REFERENCES:
patent: 5321354 (1994-06-01), Ooshima et al.
patent: 5471153 (1995-11-01), Martin

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