Test method and apparatus for semiconductor element

Details Test method and apparatus for semiconductor element Test method and apparatus for semiconductor element

1997-02-06

1999-11-23

Karlsen, Ernest

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324551, G01R 3126

Patent

active

059906987

ABSTRACT:
It is intended to provide a test method and a test apparatus for determining breakdown strength which are not affected by statistic capacity in measurement environment or the like, and can be applied to any semiconductor elements. A capacitor with known capacitance is connected to a semiconductor element, and voltage is applied to the capacitor to charge and discharge it. It is detected whether or not the semiconductor element is broken down at the moment of discharge. Either one of charge or energy injected in charging and discharging is calculated from the capacitance and voltage at the moment of breakdown, and the result of calculation is determined as the breakdown strength.

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patent: 4806857 (1989-02-01), Inamura et al.
patent: 4812755 (1989-03-01), Toshiyuki et al.
patent: 4823088 (1989-04-01), Fukuda
patent: 5159369 (1992-10-01), Hashimoto
patent: 5523699 (1996-06-01), Miyagawa
patent: 5594349 (1997-01-01), Kimura
patent: 5675260 (1997-10-01), Consiglio

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