Test key on a wafer

Details Test key on a wafer Test key on a wafer

2006-01-24

2006-01-24

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010, C324S765010

Reexamination Certificate

active

06989682

ABSTRACT:
A test key formed on a wafer has a plurality contacting pads, a first wire, and a second wire. The contacting pads are separated into a first group and a second group. The first wire surrounds at least one contacting pad of the first group and connects with one the contacting pad of the second group. The second wire connects with one contacting pad of the first group and surrounds at least one contacting pad of the second group.

REFERENCES:
patent: 4824254 (1989-04-01), Ohtsuka et al.
patent: 4933635 (1990-06-01), Deutsch et al.
patent: 5014003 (1991-05-01), Ishikawa
patent: 5059899 (1991-10-01), Farnworth et al.
patent: 5065092 (1991-11-01), Sigler

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