Test head for optically inspecting workpieces

Details Test head for optically inspecting workpieces Test head for optically inspecting workpieces

2007-12-04

2007-12-04

Ahmed, Samir (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C356S237500, C250S559060

Reexamination Certificate

active

11112536

ABSTRACT:
Apparatus for simultaneously optically inspecting top and bottom surfaces of a workpiece comprise upper and lower test heads, each head comprising at least one laser for providing a laser beam that scans its associated workpiece surface and at least one detector for detecting reflected laser light. The directions of the laser beams are selected so as to reduce or prevent cross-talk interference between the upper and lower test heads.

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U.S. Appl. No. 11/113,258, entitled “Test Head for Optically Inspecting Workpieces”, filed Apr. 23, 2005.
U.S. Appl. No. 11/113,261, entitled “Test Head for Optically Inspecting Workpieces Comprising a Lens for Elongating a Laser Spot on the Workpieces”, filed Apr. 23, 2005.
U.S. Appl. No. 11/113,260, entitled “Method and Apparatus for Selectively Providing Data From a Test Head to a Processor”, filed Apr. 23, 2005.
U.S. Appl. No. 11/112,172, entitled Test Head for Optically Inspecting Workpieces, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,190, entitled “Robotic System for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,044, entitled “Method and Apparatus for Reducing or Eliminating Stray Light in an Optical Test Head”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,909, entitled “Circularly Polarized Light for Optically Inspecting Workpieces”, filed Apr. 22, 2005.

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