Test head for optically inspecting workpieces

Details Test head for optically inspecting workpieces Test head for optically inspecting workpieces

2007-11-27

2007-11-27

Pak, Sung (Department: 2874)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S036000, C385S133000, C356S237500, C359S638000

Reexamination Certificate

active

11112172

ABSTRACT:
An optical test head comprises a block of material with a plurality of optical paths extending therethrough. At least one of the optical paths is an input optical path for receiving laser light and holding a lens for focusing the laser light on a workpiece that is proximate the head. At least another of the optical paths is an output path for receiving light that is reflected off of the workpiece and providing that light to a detector. (In one embodiment, several detectors are provided to direct specularly reflected light, narrow angle scattered light, wide angle scattered light and back scattered light to associated detectors.) Other optical elements can be affixed within or to the block of material. The test head can be used without requiring the individual optical elements to be aligned or adjusted.

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U.S. Appl. No. 11/113,258, entitled “Test Head for Optically Inspecting Workpieces”, filed Apr. 23, 2005.
U.S. Appl. No. 11/113,261, entitled “Test Head for Optically Inspecting Workpieces Comprising a Lens for Elongating a Laser Spot on the Workpieces”, filed Apr. 23, 2005.
U.S. Appl. No. 11/113,260, entitled “Method and Apparatus for Selectively Providing Data From a Test Head to a Processor”, filed Apr. 23, 2005.
U.S. Appl. No. 11/112,190, entitled “Robotic System for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,044, entitled “Method and Apparatus for Reducing or Eliminating Stray Light in an Optical Test Head”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,536, entitled “Test Head for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,909, entitled “Circularly Polarized Light for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
Office Action dated Nov. 21, 2006 in U.S. Appl. No. 11/112,044 (including attached forms).

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