Test head for optically inspecting workpieces

Details Test head for optically inspecting workpieces Test head for optically inspecting workpieces

2007-02-27

2007-02-27

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500

Reexamination Certificate

active

11113258

ABSTRACT:
An optical test apparatus comprises: a) a motor rotating a spindle which in turn rotates a workpiece such as a magnetic disk substrate; b) an upper test head comprising a laser for providing an upper laser beam to the upper surface of the workpiece, an upper lens for receiving light reflected from the upper surface, and an upper detector for generating a signal indicative of the received light; and c) a lower test head comprising a lower laser providing a laser beam to the lower surface of the workpiece, a lower lens for receiving light reflected from the lower surface and a lower detector for generating a signal indicative of the received light. The path of the lower laser beam is displaced from a radial direction of the workpiece so that the lower lens can be placed closer to the laser spot than if it was not displaced.

REFERENCES:
patent: 2938126 (1960-05-01), Adler
patent: 4082416 (1978-04-01), Runciman et al.
patent: 4794264 (1988-12-01), Quackenbos et al.
patent: 4794265 (1988-12-01), Quackenbos et al.
patent: 4875780 (1989-10-01), Moran et al.
patent: 5719840 (1998-02-01), Jann et al.
patent: 5726748 (1998-03-01), Morris
patent: 5875029 (1999-02-01), Jann et al.
patent: 6166375 (2000-12-01), Ahten et al.
patent: 6548821 (2003-04-01), Treves et al.
patent: 6566674 (2003-05-01), Treves et al.
patent: 6621571 (2003-09-01), Maeda et al.
patent: 6624884 (2003-09-01), Imaino et al.
patent: 6760100 (2004-07-01), Ivakhnenko et al.
patent: 2005/0276202 (2005-12-01), Sano et al.
U.S. Appl. No. 11/113,261, entitled “Test Head for Optically Inspecting Workpieces Comprising a Lens for Elongating a Laser Spot on the Workpieces”, filed Apr. 23, 2005.
U.S. Appl. No. 11/113,260, entitled “Method and Apparatus for Selectively Providing Data from a Test Head to a Processor”, filed Apr. 23, 2005.
U.S. Appl. No. 11/112,172, entitled “Test Head for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,190, entitled “Robotic System for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,044, entitled “Method and Apparatus for Reducing or Eliminating Stray Light in an Optical Test Head”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,536, entitled “Test Head for Optically Inspecting Workpieces”, filed Apr. 22, 2005.
U.S. Appl. No. 11/112,909, entitled “Circularly Polarized Light for Optically Inspecting Workpieces”, filed Apr. 22, 2005.

Affiliated with

Also associated with

Rating

Test head for optically inspecting workpieces does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Test head for optically inspecting workpieces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test head for optically inspecting workpieces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3854949