Test handler temperature monitoring system

Details Test handler temperature monitoring system Test handler temperature monitoring system

2005-12-06

2005-12-06

Verbitsky, Gail (Department: 2859)

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

C374S130000, C374S132000, C324S1540PB

Reexamination Certificate

active

06971793

ABSTRACT:
The invention provides a temperature monitoring system for a semiconductor test handler. A preparation stage brings a test device to a predetermined temperature for testing at a test platform at said predetermined temperature. At least one radiation sensor, such as a thermopile device, is employed in the test handler for detecting a surface temperature of the test device by measuring radiation emitted from the test device.

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