Test gas leak detector

Measuring and testing – With fluid pressure – Leakage

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

G01M 320

Patent

active

057081948

DESCRIPTION:

BRIEF SUMMARY
BACKGROUND OF THE INVENTION

The present invention relates to a leak detector suitable for detecting leakage with a test gas connection, a test gas detector, a gas pump and a test gas line extending between the test gas connection and the gas pump and connected to the inlet of the test gas detector via a blockable branch. With the branch open--measurement mode--a part of the gas which contains test gas in case of the presence of a leak, flowing through the test gas line, passes via the branch line into the test gas detector and it is recorded there.
In leak detectors of this kind, the response time, i.e. the time which elapses from the point of time when the gas enters into the test gas connection until the point of time when the test gas is recorded, is relatively long, at high pressures, in particular.


SUMMARY OF THE INVENTION

It is the task of the present invention to reduce the response time in a leak detector of the aforementioned kind.
This task is solved by the present invention through the characteristic features of the patent claims.
Through the proposed measures it is achieved that in the measurement operating mode substantially the entire quantity of the gas flowing through the test gas line enters directly into the test gas detector. Thus the response time is very much reduced, at higher pressures even by a factor of more than 10.
If the test gas detector comprises a mass spectrometer, and ahead of the mass spectrometer a high vacuum pump, preferably a turbomolecular pump through which the test gas passes upstream, then this invention has the effect that the gas flowing through the test gas line and thus the test gas contained in it arrives completely and directly at the discharge region of the high vacuum pump, so that the desired reduction in the response time can be attained.
Further advantages and details of the present invention shall be explained by referring to the design examples presented in drawing FIGS. 1 to 6.


BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic representation of a leak detection instrument according to a first embodiment of the present invention.
FIG. 2 is a schematic representation of a leak detection instrument in a measurement mode according to a second embodiment of the present invention.
FIG. 3 is a schematic representation of the leak detection instrument of the second embodiment in a pumping mode.
FIG. 4 is a schematic representation of the leak detection instrument of the second embodiment in a standby mode.
FIG. 5 shows a link in a measurement mode between a test gas line and a high vacuum pump according to an embodiment of the present invention.
FIG. 6 shows a link in a pumping mode between a test gas line and a high vacuum pump according to an embodiment of the present invention.


DESCRIPTION OF THE INVENTION

In the figures, the leak detection instrument is generally designated as 1, the test gas connection is designated as 2, the test gas detector as 3, the gas supply of backing pump as 4 and the test gas line extending between test gas connection 2 and backing pump 4 as 5. Test gas line 5 is connected to the inlet region 6 of the test gas detector 3 via two line sections 7 and 8.
In the design example according to drawing FIG. 1 the line sections 7 and 8 as well as the intermediate piece 5' of the test gas line 5 between the connections of line sections 7 and 8 to the test gas line 5 are each equipped with a 2/2 way valve 11, 12 or 13. In the measurement mode valves 11 and 12 are open, valve 13 is closed. The gas entering into test gas inlet 2 flows in its entirety directly into the inlet region 6 of the test gas detector 3. With closed valves 11, 12 and open valve 13--pumping operation--there exists the possibility of evacuating a test object or vacuum chamber connected to test gas connection 2. During standby mode the valves 11, 13 are closed and valve 12 is open.
In the design examples according to drawing FIGS. 2 to 4 the test gas detector 3 comprises a mass spectrometer 14 and a high vacuum pump 15, preferably a turbomolecular vacuum pu

REFERENCES:
patent: 3626760 (1971-12-01), Briggs et al.
patent: 3939695 (1976-02-01), Booth
patent: 3968675 (1976-07-01), Briggs
patent: 4472962 (1984-09-01), Mennenga
patent: 5343740 (1994-09-01), Myneni
patent: 5561240 (1996-10-01), Ochiai et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Test gas leak detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Test gas leak detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test gas leak detector will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-328252

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.