Test fixture for use in a high speed electronic semiconductor ch

Details Test fixture for use in a high speed electronic semiconductor ch Test fixture for use in a high speed electronic semiconductor ch

1975-03-06

1976-09-07

Rolinec, R. V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

G01R 3126

Patent

active

039796710

ABSTRACT:
The invention relates to apparatus for the testing of high circuit density devices fabricated by large scale integration techniques. More specifically, the invention is directed to a test fixture used in a test system for determining the merit or electrical integrity of small semiconductor chips, diced from a semiconductor wafer having a large number of chips. Each chip being a high circuit density device, e.g., a small monolithic semiconductor structure having a large number of closely spaced circuits thereon and therein.

REFERENCES:
patent: 3437929 (1969-04-01), Glenn
patent: 3803489 (1974-04-01), Miller

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