Test device for wafer testing digital semiconductor circuits

Details Test device for wafer testing digital semiconductor circuits Test device for wafer testing digital semiconductor circuits

2007-02-20

2007-02-20

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

10995111

ABSTRACT:
The invention relates to a test device for testing digital semiconductor circuits at wafer level having a probe card which sends/receives digital test signals to/from a test head and distributes signal channels, carrying test signals, to the respective location on the wafer via an interposer. The interposer has a printed circuit board with contact pins on both sides, and a needle or contact stud card. Additionally, all signal channels in the test device or signal channels which carry time-critical test signals in the test device contain a respective signal amplifier, the signal amplifiers preferably being digital signal amplifiers which are mounted on the printed circuit board of the interposer.

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