Test circuit, semiconductor product wafer having the test...

Details Test circuit, semiconductor product wafer having the test... Test circuit, semiconductor product wafer having the test...

2007-06-13

2008-10-07

Schillinger, Laura M (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

C438S017000, C700S108000, C324S765010

Reexamination Certificate

active

07432115

ABSTRACT:
A test circuit and a method of monitoring a manufacturing process of a semiconductor integrated circuit using the test circuit are provided. The test circuit comprises elements to be tested; a selection circuit for sequentially selecting at least one of the elements at a time. The test circuit and pads used for testing the elements are placed within a scribe line on a semiconductor wafer.

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