Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2008-03-11
2008-03-11
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C029S842000
Reexamination Certificate
active
11306442
ABSTRACT:
A test apparatus for integrated circuits includes a data collector (1). The data collector includes a cantilever (10) and at least one probe (20). The probe is formed at a free end (18) of the cantilever and includes at least one carbon nanotube (22). A method for manufacturing the test apparatus for integrated circuits includes the steps of: (a) forming a substrate (12) at a free end of a cantilever; (b) forming at least one electrically conductive film (14) on the substrate; (c) depositing at least one catalyst film (16) on the corresponding electrically conductive film; and (d) depositing at least one carbon nanotube on each catalyst film thereby forming at least one probe thereat.
REFERENCES:
patent: 6668628 (2003-12-01), Hantschel et al.
patent: 6753693 (2004-06-01), Seo et al.
patent: 6756795 (2004-06-01), Hunt et al.
patent: 6834243 (2004-12-01), Zemer et al.
patent: 2003/0010910 (2003-01-01), Colbert et al.
patent: 2003/0175462 (2003-09-01), Nishino et al.
patent: 2004/0106218 (2004-06-01), Wang et al.
Hon Hai Precision Industry Co. Ltd.
Hsu Winston
Karlsen Ernest
LandOfFree
Test apparatuses for integrated circuits and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Test apparatuses for integrated circuits and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test apparatuses for integrated circuits and method for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3910211