Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2006-05-02
2006-05-02
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S760020
Reexamination Certificate
active
07038441
ABSTRACT:
The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in the position close to the chuck.
REFERENCES:
patent: 5077523 (1991-12-01), Blanz
patent: 5410259 (1995-04-01), Fujihara et al.
patent: 5936416 (1999-08-01), Tanaka et al.
patent: 6420864 (2002-07-01), Abraham et al.
patent: 6545458 (2003-04-01), Yamazaki
patent: 6762616 (2004-07-01), Kawaguchi et al.
Dietrich Claus
Kiesewetter Jorg
Kreissig Stefan
Runge Dietmar
Schneidewind Stefan
Baker & Botts LLP
Karlsen Ernest
SUSS MicroTec Testsystems (GmbH)
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