Test apparatus for testing substrates at low temperatures

Details Test apparatus for testing substrates at low temperatures Test apparatus for testing substrates at low temperatures

2006-05-16

2006-05-16

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07046025

ABSTRACT:
A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and holding means for fixing a substrate carrier which receives the test substrate. Spatially and thermally defined test conditions are maintained with minimal energy and labor costs both at room temperatures and at low temperatures. This is achieved by providing a vacuum chamber which surrounds the working area of the chuck. The chuck is on one side thermally decoupled from the uncooled chuck drive and on the other side is thermally connected in a releasable manner to the test substrate. The cooled chuck and the cooled test substrate are shielded from the thermal radiation of the surrounding uncooled assemblies by means of a directly cooled thermal radiation shield.

REFERENCES:
patent: 4692694 (1987-09-01), Yokoi et al.
patent: 5266889 (1993-11-01), Harwood et al.
patent: 5775416 (1998-07-01), Heimanson et al.
patent: 5930456 (1999-07-01), Vosen
patent: 6169409 (2001-01-01), Amemiya
patent: 6194907 (2001-02-01), Kanao et al.
patent: 6198299 (2001-03-01), Hollman
patent: 6222990 (2001-04-01), Guardado et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6538440 (2003-03-01), Dean et al.
patent: 6735378 (2004-05-01), Kellerman et al.
patent: 6771895 (2004-08-01), Gat et al.

Affiliated with

Also associated with

Rating

Test apparatus for testing substrates at low temperatures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Test apparatus for testing substrates at low temperatures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test apparatus for testing substrates at low temperatures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3599849