Test apparatus for defects of plate

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions

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Details

356239, 250563, G01N 2188

Patent

active

044602731

ABSTRACT:
A test apparatus for detecting defects on a plate is disclosed. An illumination light is focused to one surface of the plate and another illumination light is focused to the other surface of the plate, and scattered light from the defects on the surfaces are detected to separately detect the defects on the front and rear surfaces of the plate.

REFERENCES:
patent: 3536405 (1970-10-01), Flower
patent: 3536409 (1970-10-01), Flower
patent: 3836261 (1974-09-01), Clarke
patent: 3972616 (1976-08-01), Minami et al.
patent: 4030830 (1977-06-01), Holly
patent: 4148065 (1979-04-01), Nakagawa

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