Test apparatus and probe card

Details Test apparatus and probe card Test apparatus and probe card

2011-06-14

2011-06-14

Nguyen, Ha Tran T (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754010, C324S754030, C324S754070, C324S762010

Reexamination Certificate

active

07960991

ABSTRACT:
Provided is a test apparatus including a test head main body130that communicates a signal with the device under test200, a prober110on which the device under test200is mounted, and a probe card300positioned between the test head main body130and the prober110, where the probe card300includes: a plurality of probe pins320provided on a surface thereof facing the prober110and electrically connected to a terminal of the device under test200; a plurality of test head pads330provided on a surface thereof facing the test head main body130and electrically connected to spring pins129on the test head main body130and to the probe pins320; and prober pads340provided on a surface thereof facing the prober110and electrically connected to the plurality of probe pins320.

REFERENCES:
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International Search Report (ISR) for PCT/JP2007/073597 for Examiner consideration, citing U.S. Appl. Nos. 1 and Foreign Patent Document Nos. 1-4 listed above.
Written Option (PCT/ISA/237) of PCT/JP2007/073597.

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