Test apparatus

Details Test apparatus Test apparatus

1998-11-20

2000-06-20

Font, Frank G.

Optics: measuring and testing

Sample, specimen, or standard holder or support

356213, G01N 2100

Patent

active

060783877

ABSTRACT:
Apparatus for testing electrical bonds of a semiconductor device includes a cantilever arm (14a) with a test head (16) mounted thereon. The test head (16) is biased by the arm (14a) against a base plate (11), but can be moved away from the base plate (11) by an air bearing (22) to ensure substantially frictionless initial positioning. Sensing means (32;34) for sensing contact with a semiconductor substrate are also disclosed.

REFERENCES:
patent: 4531909 (1985-07-01), Takeshita
patent: 5774209 (1998-06-01), Shestock

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