Tertiary alkylsilane

Details Tertiary alkylsilane Tertiary alkylsilane

1998-12-09

2000-04-04

Shaver, Paul F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

C07F 708

Patent

active

060463503

ABSTRACT:
A novel tertiary alkylsilane is disclosed, which is useful as a variety of starting materials such as for photoreactive materials including semiconductor materials, insulative materials and photoresists, polymerization initiators and silicone-based ceramics precursors and is contributive to the safe and efficient production of high grade semiconductors.

REFERENCES:
Akira Watanabe, et al., "Electrical and Optical Properties of Heat-treated Silicon Network Polymers", The Chemical Society of Japan, Chemistry Letters (1991), pp. 1101-1104.

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